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Journal

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

AVS Science and Technology Society

Metrics

SJR
0.359Q3
SCImago
h-index
131
CAS tier
Tier 4
Chinese Academy of Sciences
Citations per paper
1.55
last 2 years
Articles per year
117
Fee (APC), est.
$2,754
estimated, check the journal

About this journal

ISSN
2166-2746 (print) · 2166-2754 (online)
Publisher
AVS Science and Technology Society
Country
Northern America
Access
Subscription · 0% gold OA
Original research
0%
Subject areas
Chemical Engineering, Engineering, Materials Science, Physics and Astronomy
Categories
Materials Science, Materials Chemistry
Common topics
Physics, Materials science, Quantum mechanics, Chemistry, Organic chemistry

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